Plasma-Therm Dry Etching Workshop
University of Alberta, The NanoFab

Plasma-Therm, a leading manufacturer of plasma based etching and deposition equipment, is providing a workshop focusing on the fundamentals of plasma etching. Lectures will include basics of plasma etching mechanisms with relevant examples relating to compound semiconductor, dielectric, metal, and deep silicon etching. State-of-the-art etching technologies for deep silicon will be reviewed.  Fundamental and new ideas for endpoint detection and sample thermal budget management will be presented.


October 1, 2013

Talylor Meeting RM 1-010
National Institute for Nanotechnology
University of Alberta
Edmonton, AB

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Site close date: 10/10/2013
If you have any questions contact David Lishan by email at

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