Plasma-Therm Dry Etching Workshop
University of Alberta, The NanoFab


Plasma-Therm, a leading manufacturer of plasma based etching and deposition equipment, is providing a workshop focusing on the fundamentals of plasma etching. Lectures will include basics of plasma etching mechanisms with relevant examples relating to compound semiconductor, dielectric, metal, and deep silicon etching. State-of-the-art etching technologies for deep silicon will be reviewed.  Fundamental and new ideas for endpoint detection and sample thermal budget management will be presented.

 


When
October 1, 2013


Where
Talylor Meeting RM 1-010
National Institute for Nanotechnology
University of Alberta
Edmonton, AB


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Site close date: 10/10/2013
 
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